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Title:
THERMAL FLUX SENSOR AND METHOD FOR MANFUACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2019/044558
Kind Code:
A1
Abstract:
A thermal flux sensor (1) comprises an insulation substrate (10), first and second via holes (11, 12), a first thermoelectric conversion member (40), a second thermoelectric conversion member (50), an obverse-surface protection member (20), a reverse-surface protection member (30), an obverse-surface barrier membrane (22), and a reverse-surface barrier membrane (32). The obverse-surface barrier membrane includes a material having lower permeability with respect to an oxidizing gas than does the obverse-surface protection member. The reverse-surface barrier membrane includes a material having lower permeability with respect to an oxidizing gas than does the reverse-surface protection member.

Inventors:
SHIRAISHI, Yoshihiko (1-1 Showa-cho, Kariya-cit, Aichi 61, 〒4488661, JP)
SAKAIDA, Atusi (1-1 Showa-cho, Kariya-cit, Aichi 61, 〒4488661, JP)
IMURA, Tomohiro (1-1 Showa-cho, Kariya-cit, Aichi 61, 〒4488661, JP)
WATANABE, Hayato (1-1 Showa-cho, Kariya-cit, Aichi 61, 〒4488661, JP)
Application Number:
JP2018/030655
Publication Date:
March 07, 2019
Filing Date:
August 20, 2018
Export Citation:
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Assignee:
DENSO CORPORATION (1-1 Showa-cho, Kariya-city Aichi, 61, 〒4488661, JP)
International Classes:
G01K17/20; H01L35/32
Foreign References:
JP2015014584A2015-01-22
JPS52106776A1977-09-07
JPS4614117B11971-04-15
JP2017117653A2017-06-29
JP2014007408A2014-01-16
Attorney, Agent or Firm:
TOHDA, Kiyoshi (PDI Patent & Trademark Firm, KOJIMACHI MK BLDG. 3F 3-30, Kojimachi 4, Chiyoda-k, Tokyo 83, 〒1020083, JP)
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