Title:
THERMAL INFRARED SENSOR AND GAS MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/002499
Kind Code:
A1
Abstract:
The present invention is a thermal infrared sensor for gas measurement characterized by being provided with a detection element including a thermal detection layer for outputting temperature variation as an electrical signal, a light-receiving surface electrode provided on a light-receiving surface side of the thermal detection layer, and a rear-surface electrode provided on the opposite side of the thermal detection layer from the light-receiving surface electrode, and characterized in that the light-receiving surface electrode has a periodic structure that selectively absorbs infrared radiation of the absorption wavelength of a sample gas.
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Inventors:
KOMODA JUNYA (JP)
YAMAMOTO KANSHO (JP)
YAMAMOTO KANSHO (JP)
Application Number:
PCT/JP2015/067258
Publication Date:
January 07, 2016
Filing Date:
June 16, 2015
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01J1/02; G01N21/3504; H01L35/22; H01L37/02
Foreign References:
| JP2009175124A | 2009-08-06 | |||
| JP2000503122A | 2000-03-14 |
Other References:
SHINPEI OGAWA ET AL.: "Wavelength Selective Uncooled Infrared Sensor by Plasmonic Absorber", MITSUBISHI DENKI GIHO, vol. 87, no. 6, 25 June 2013 (2013-06-25), pages 353 - 356, XP032524872
Attorney, Agent or Firm:
Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)
Patent business corporation Fukami patent firm (JP)
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