Title:
THERMAL MASS-FLOW METER AND MASS-FLOW CONTROL DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2015/141437
Kind Code:
A1
Abstract:
[Problem] To provide a thermal mass-flow meter in which, even when working with a condensing gas that needs to be heated to 250°C, said gas does not re-liquefy or condense inside a sensor tube. Also, to provide a mass-flow control device using said thermal mass-flow meter. [Solution] This thermal mass-flow meter, which has a case that contains a sensor tube and a sensor wire and is provided so as to contact a mounting surface of a base, is provided with a heat-transfer block that comprises a good conductor of heat and is in surface contact with both the mounting surface of the base and a side surface of the case. In a preferred embodiment, a temperature-regulating block provided so as to contact a side surface of the base is also provided.
Inventors:
ISHII MAMORU (JP)
Application Number:
PCT/JP2015/055694
Publication Date:
September 24, 2015
Filing Date:
February 26, 2015
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
International Classes:
G01F1/684
Foreign References:
| JPH06214658A | 1994-08-05 | |||
| JPH0184022U | 1989-06-05 |
Attorney, Agent or Firm:
PROSPEC PATENT FIRM (JP)
Patent business corporation Pros Peck patent firm (JP)
Patent business corporation Pros Peck patent firm (JP)
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