Title:
THERMAL TYPE AIR FLOW AMOUNT SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/011387
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a thermal type air flow amount sensor which can prevent the absorption of water in a silicon oxide film formed on a part closest to the surface thereof (the uppermost part of the surface thereof) and can reduce the error of measurement. In this thermal type air flow amount sensor, a silicon oxide film (4) formed on a part closest to the surface of the sensor (the uppermost part of the surface of the sensor) is ion-doped using at least one atom or molecule selected from silicon, oxygen and inert elements such as argon and nitrogen to increase the concentration of atoms contained in the silicon oxide film (4) compared with the concentration of atoms before the ion doping.
Inventors:
ISHITSUKA Norio (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
石塚 典男 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
MINAMITANI Rintaro (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
石塚 典男 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
MINAMITANI Rintaro (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
Application Number:
JP2011/065463
Publication Date:
January 26, 2012
Filing Date:
July 06, 2011
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS, LTD. (2520, Takaba Hitachinaka-sh, Ibaraki 03, 〒3128503, JP)
日立オートモティブシステムズ株式会社 (〒03 茨城県ひたちなか市高場２５２０番地 Ibaraki, 〒3128503, JP)
ISHITSUKA Norio (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
石塚 典男 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
日立オートモティブシステムズ株式会社 (〒03 茨城県ひたちなか市高場２５２０番地 Ibaraki, 〒3128503, JP)
ISHITSUKA Norio (HITACHI LTD., 1-1, Omikacho 7-chome, Hitachi-sh, Ibaraki 92, 〒3191292, JP)
石塚 典男 (〒92 茨城県日立市大みか町七丁目１番１号 株式会社日立製作所 日立研究所内 Ibaraki, 〒3191292, JP)
International Classes:
G01F1/692
Attorney, Agent or Firm:
HIRAKI Yusuke (Kamiya-cho MT Bldg. 19F, 3-20 Toranomon 4-chome, Minato-k, Tokyo 01, 〒1050001, JP)
Download PDF:
Claims:
Previous Patent: MOUNT STRUCTURE FOR VEHICLE DAMPER
Next Patent: TERMINAL CONNECTION STRUCTURE AND METHOD OF MANUFACTURING THE SAME
Next Patent: TERMINAL CONNECTION STRUCTURE AND METHOD OF MANUFACTURING THE SAME