Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
THERMALLY CURED UNDERCOAT FOR LITHOGRAPHIC APPLICATION
Document Type and Number:
WIPO Patent Application WO2005089150
Kind Code:
A3
Abstract:
Thermally curable undercoat composition comprising for producing a bilayer relief image comprising a) a polymer of Structure (I) comprising repeating units of Structure (II), (III), and (IV) wherein each R1 is independently a hydrogen atom or an alkyl group having from 1 to 3 carbon atoms or a halogen atom; L represents a single bond, a -COO- group, or a -CON(R2)- group; R2 represents a hydrogen atom or an alkyl group having from 1 to 3 carbon atoms; M represents a C5-7 cycloalkylene group or an arylene group having from 6 to 18 carbon atoms; W represents a single bond, a -COO- group, -0-, -(C=O)-, or -(SO2)-; R3 represents a hydrogen atom or a linear unsubstituted or substituted alkyl having from 5 to 30 carbon atoms or an unsubstituted or substituted cycloalkyl group having from 5 to 30 carbon atoms, a bridged unsubstituted or substituted alicyclic hydrocarbon group having from 5 to 25 carbon atoms or an unsubstituted or substituted aryl group having from 6 to 18 carbon atoms or an arylalkyl group having from 7 to 18 carbon atoms; n is an integer from 1 to 3, q is an integer from 0 to 3, the sum of n and q being no greater than 5; R4 is a linear or branched or cyclic C1 - C10 alkyl or a halogen group; R5 is an alkyl or branched alkyl or cyclic alkyl or an unsubstituted or substituted alicyclic group, having 5 to 30 carbon atoms or (R60)tR7 group where R6 is a C1-10 linear or branched alkylene group and R7 is linear, branched or cyclic alkyl or an unsubstituted or substituted alicyclic group or an unsubstituted or substituted a romatic or a Ikyl a romatic group having 1 to 30 carbon atoms and t is an integer about 1 to 4; b) a phenolic crosslinker; c) a thermal acid generator (TAG); and d) a solvent.

Inventors:
DE BINOD B (US)
MALIK SANJAY (US)
KOCAB THOMAS J (US)
SARUBBI THOMAS (US)
Application Number:
PCT/US2005/007588
Publication Date:
November 23, 2006
Filing Date:
March 09, 2005
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FUJIFILM ELECTRONIC MATERIALS (US)
International Classes:
H01L21/31; G03C1/492; G03F7/09; H01L21/469
Foreign References:
EP0987600B12003-11-26
Other References:
See also references of EP 1743363A4
Download PDF: