Title:
THERMOPILE INFRARED SENSOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2024/083051
Kind Code:
A1
Abstract:
The present application relates to a thermopile infrared sensor and a manufacturing method therefor. The thermopile infrared sensor comprises an MEMS unit, and the MEMS unit comprises: a plurality of thermocouples, each thermocouple comprising a hot junction end and a cold junction end and the thermocouples being connected in series to form a thermopile; and an infrared absorption layer covering each thermocouple, the infrared absorption layer being a composite layer comprising a silicon oxide and a silicon nitride. A plurality of release holes passing through the infrared absorption layer are provided near each thermocouple. The density of the release holes near the hot junction end of each thermocouple is higher than that of the release holes near the cold junction end of each thermocouple. The release holes near the hot junction ends of the thermocouples are provided with first cavities recessed into side walls of the release holes. In the present application, the composite layer of the silicon oxide and the silicon nitride is used as the infrared absorption layer and is easy to manufacture, infrared energy is gathered via the first cavities to improve the infrared absorption rate, and therefore the infrared absorption rate is high.
Inventors:
CAI QINGHUA (CN)
ZHANG XINWEI (CN)
YANG JIE (CN)
GU JIANJIAN (CN)
XUE JINGJING (CN)
LI JUNPING (CN)
KANG JIANLI (CN)
CHEN JIAXIA (CN)
ZHANG XINWEI (CN)
YANG JIE (CN)
GU JIANJIAN (CN)
XUE JINGJING (CN)
LI JUNPING (CN)
KANG JIANLI (CN)
CHEN JIAXIA (CN)
Application Number:
PCT/CN2023/124620
Publication Date:
April 25, 2024
Filing Date:
October 13, 2023
Export Citation:
Assignee:
CSMC TECHNOLOGIES FAB2 CO LTD (CN)
International Classes:
G01J5/12
Foreign References:
| CN112591706A | 2021-04-02 | |||
| JP2012163347A | 2012-08-30 | |||
| US20220082444A1 | 2022-03-17 |
Attorney, Agent or Firm:
BEIJING BESTIPR INTELLECTUAL PROPERTY LAW CORPORATION (CN)
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