THERMOPLASTIC POLYURETHANE FOAM, PROCESS FOR PRODUCTION THEREOF AND POLISHING PADS MADE OF THE FOAM

Title:

THERMOPLASTIC POLYURETHANE FOAM, PROCESS FOR PRODUCTION THEREOF AND POLISHING PADS MADE OF THE FOAM

Document Type and Number:

WIPO Patent Application WO/2002/046283

Kind Code:

A1

Abstract:

The invention aims at providing a polyurethane foam which has a uniformly foamed structure, attains improvement in the flatness of a polished surface and flatting efficiency, is prolonged in serviceable life as compared with those of the prior art, and is suitably usable as a polishing pad. This aim is attained by a polyurethane foam made of a thermoplastic polyurethane which is produced by reacting a polymeric polyol with an organic diisocyanate and a chain-lengthening agent, contains nitrogen atoms resulting from isocyanate in an amount of 6 wt% or above, and exhibits a dynamic viscoelasticity at 50°C (E'¿50?) of 5 x 10?9¿ dyn/cm?2¿ or above, and having a density of 0.5 to 1.0 g/cm?3¿, a foam size of 5 to 200 $g(m)m, and a hardness (JIS-C hardness) of 90 or above.

Inventors:

KANEDA SHUNJI (JP)
OKAMOTO CHIHIRO (JP)

Application Number:

PCT/JP2001/010613

Publication Date:

June 13, 2002

Filing Date:

December 05, 2001

Export Citation:

Click for automatic bibliography generation Help

Assignee:

KURARAY CO (JP)
KANEDA SHUNJI (JP)
OKAMOTO CHIHIRO (JP)

International Classes:

B24B37/24; B24D3/28; B24D13/14; B29C44/34; C08G18/08; C08G18/42; C08G18/66; (IPC1-7): C08J9/12; B24B37/00; H01L21/304

Foreign References:

JP2001261874A	2001-09-26
JPH11349680A	1999-12-21
JPH08113664A	1996-05-07

Other References: