Title:
THICKNESS MEASUREMENT METHOD, THICKNESS MEASUREMENT DEVICE, DEFECT DETECTION METHOD, AND DEFECT DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/162121
Kind Code:
A1
Abstract:
This thickness measurement method comprises: a step (S11) for using a heating device (10) to heat a point on the surface of an object of measurement; a step (S12) for generating thermal images corresponding to the temperature of the surface of the object by using a photography device (20) to photograph the heated surface of the object at a prescribed time interval; steps (S21-S24) for using the thermal images generated by the photography device to acquire temperature data (D1) indicating changes over time in the temperatures at multiple positions on the surface of the object; a step (S25) for fitting, to the temperature data, a solution function (T(r,t)) indicating a solution to a heat conduction equation corresponding to a point heat source and including a parameter relating to the thickness of the object; and a step (S26) for calculating the thickness of the object on the basis of the value of the parameter included in the solution function that has been fit.
Inventors:
IRIE YOUSUKE
INOUE HIROTSUGU
SAKAMOTO KOUTARO
INOUE HIROTSUGU
SAKAMOTO KOUTARO
Application Number:
PCT/JP2020/001048
Publication Date:
August 13, 2020
Filing Date:
January 15, 2020
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01B21/08; G01N25/72
Domestic Patent References:
| WO2017130251A1 | 2017-08-03 | |||
| WO2017130251A1 | 2017-08-03 |
Foreign References:
| JP2006125933A | 2006-05-18 | |||
| JP2011122859A | 2011-06-23 |
Other References:
K. BRUGGER: "Exact Solutions for the Temperature Rise in a Laser-Heated Slab", JOURNAL OF APPLIED PHYSICS, vol. 43, no. 2, 1972, pages 577 - 583, XP055729808
K. BRUGGER: "Exact Solutions for the Temperature Rise in a Laser-Heated Slab", JOURNAL OF APPLIED PHYSICS, vol. 43, 1972, pages 573 - 583
See also references of EP 3907501A4
K. BRUGGER: "Exact Solutions for the Temperature Rise in a Laser-Heated Slab", JOURNAL OF APPLIED PHYSICS, vol. 43, 1972, pages 573 - 583
See also references of EP 3907501A4
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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