Title:
THICKNESS MEASURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/008851
Kind Code:
A1
Abstract:
A thickness measuring apparatus according to an embodiment of the present invention may comprise: a light emission unit for irradiating light to an object; a lens unit for collecting light generated in the light emission unit; a lattice pattern generation unit through which light collected through the lens unit passes; a light reception unit for receiving light reflected from multiple interlayer boundaries of the object; and a calculation unit for obtaining a thickness of at least one of multiple layers of the object on the basis of a difference in height between lattice patterns which are formed on a surface of the object by the lattice pattern generation unit.
Inventors:
BAE JINHYEONG (KR)
Application Number:
PCT/KR2017/005663
Publication Date:
January 11, 2018
Filing Date:
May 31, 2017
Export Citation:
Assignee:
LG ELECTRONICS INC (KR)
International Classes:
G01B11/06; G01B9/02
Foreign References:
| KR20160002104A | 2016-01-07 | |||
| KR20120100064A | 2012-09-12 | |||
| JP2015090315A | 2015-05-11 | |||
| KR101544968B1 | 2015-08-19 | |||
| JP2013029342A | 2013-02-07 |
Attorney, Agent or Firm:
KIM, Ki Moon (KR)
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