Title:
THIN-FILM ACTUATOR AND INKJET HEAD
Document Type and Number:
WIPO Patent Application WO/2011/007645
Kind Code:
A1
Abstract:
Provided is a thin-film actuator, which comprises a thin-film layer having a displacement film that expands and contracts in the direction of the film surface in accordance with drive signals, and a substrate, to which both ends or the edges of the thin-film layer are anchored such that the thin-film layer is displaced in the direction orthogonal to the film surface with the expansion of the displacement film produced by the drive signals. The thin-film layer has initial stress in the direction of expansion along the film surface when not driven.
Inventors:
MATSUDA SHINYA (JP)
Application Number:
PCT/JP2010/060513
Publication Date:
January 20, 2011
Filing Date:
June 22, 2010
Export Citation:
Assignee:
KONICA MINOLTA HOLDINGS INC (JP)
MATSUDA SHINYA (JP)
MATSUDA SHINYA (JP)
International Classes:
H02N2/00; B41J2/045; B41J2/055; H01L41/09; H01L41/187
Foreign References:
| JP2000141644A | 2000-05-23 | |||
| JPH11334063A | 1999-12-07 | |||
| JP2001260348A | 2001-09-25 | |||
| JP2009081262A | 2009-04-16 | |||
| JP2009073122A | 2009-04-09 | |||
| JP2002113866A | 2002-04-16 | |||
| JP2008246797A | 2008-10-16 |
Download PDF: