Title:
THIN FILM BATTERY FABRICATION WITH MASK-LESS ELECTROLYTE DEPOSITION
Document Type and Number:
WIPO Patent Application WO/2012/173874
Kind Code:
A3
Abstract:
A method of fabricating a thin film battery may include a blanket deposition of an electrolyte layer followed by selective laser patterning of the electrolyte layer. Some or all the other device layers may be in situ patterned layers - formed using shadow masks.
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Inventors:
SONG DAOYING (US)
JIANG CHONG (US)
KWAK BYUNG SUNG LEO (US)
JIANG CHONG (US)
KWAK BYUNG SUNG LEO (US)
Application Number:
PCT/US2012/041410
Publication Date:
April 11, 2013
Filing Date:
June 07, 2012
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
SONG DAOYING (US)
JIANG CHONG (US)
KWAK BYUNG SUNG LEO (US)
SONG DAOYING (US)
JIANG CHONG (US)
KWAK BYUNG SUNG LEO (US)
International Classes:
H01M14/00
Foreign References:
US20090148764A1 | 2009-06-11 | |||
US20090208671A1 | 2009-08-20 | |||
KR20100130450A | 2010-12-13 | |||
US6764525B1 | 2004-07-20 | |||
US20100323471A1 | 2010-12-23 |
Other References:
See also references of EP 2721689A4
Attorney, Agent or Firm:
DANIELSON, Mark, J. et al. (P.O.Box 10500Mclean, VA, US)
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