Title:
THIN FILM BULK ACOUSTIC RESONATOR AND MANUFACTURING PROCESS THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/248572
Kind Code:
A1
Abstract:
Disclosed is a thin film bulk acoustic resonator, comprising a bottom electrode layer, a piezoelectric layer, and a top electrode layer which are provided on the upper part of a substrate on which an acoustic reflection structure is located, a part of the piezoelectric layer corresponding to the boundary between the piezoelectric layer and the acoustic reflection structure being depolarized to form a depolarized part. Also disclosed is a manufacturing process for a thin film bulk acoustic resonator, comprising: manufacturing a bottom electrode layer on a substrate on which an acoustic reflection structure is formed or to be formed, so as to cover the acoustic reflection structure; manufacturing a piezoelectric layer on the bottom electrode layer; depolarizing a part of the piezoelectric layer corresponding to the boundary between the piezoelectric layer and the acoustic reflection structure, so as to form a depolarized part; and manufacturing a top electrode layer on the piezoelectric layer. The thin film bulk acoustic resonator and the manufacturing process therefor can inhibit energy from being taken away by transverse waves from a resonance area on the upper part of a cavity of a resonator, thereby ensuring the mechanical vibration strength of a resonance area, inhibiting parasitic oscillation, and improving the Q factor value of a resonator.
Inventors:
LI LINPING (CN)
SHENG JINGHAO (CN)
JIANG ZHOU (CN)
SHENG JINGHAO (CN)
JIANG ZHOU (CN)
Application Number:
PCT/CN2020/098557
Publication Date:
December 16, 2021
Filing Date:
June 28, 2020
Export Citation:
Assignee:
HANGZHOU JWL TECH INC (CN)
International Classes:
H03H3/02; H03H9/02
Domestic Patent References:
| WO2019129979A1 | 2019-07-04 |
Foreign References:
| CN1595799A | 2005-03-16 | |||
| CN108574473A | 2018-09-25 | |||
| CN109546985A | 2019-03-29 | |||
| CN107800396A | 2018-03-13 | |||
| US20180309425A1 | 2018-10-25 |
Other References:
See also references of EP 4164126A4
Attorney, Agent or Firm:
XIAMEN FEBE INTELLECTUAL PROPERTY AGENCY GP (CN)
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