Title:
THIN-FILM BULK ACOUSTIC RESONATOR
Document Type and Number:
WIPO Patent Application WO/2022/077707
Kind Code:
A1
Abstract:
A thin-film bulk acoustic resonator (100) comprising: a substrate (110); an acoustic reflector structure (120) either disposed in an upper surface of the substrate (110) or disposed above the substrate (110); and a piezoelectric vibration assembly (150) disposed above the acoustic reflector structure (120). The piezoelectric vibration assembly (150) comprises a piezoelectric functional film (153), and a first electrode (151) and a second electrode (152) disposed on two opposite surfaces of the piezoelectric functional film (153). A mass load ring (130) having a through hole cavity (131) is disposed either above or below the piezoelectric vibration assembly (150). An isolation layer (140) is provided between the mass load ring (130) and the piezoelectric vibration assembly (150). A region in which orthographic projections of the acoustic reflector structure (120), the first electrode (151), the piezoelectric functional film (153), and the second electrode (152) overlap defines an effective region (160). The mass load ring (130) is disposed along a peripheral region of the effective region (160). The inner perimeter of the mass load ring (130) falls within an outer perimeter of the effective region (160), and the outer perimeter of the mass load ring (130) falls outside of, on, or within the outer perimeter of the effective region (160).
Inventors:
DOU SHAOXU (CN)
WU KE (CN)
HAN QI (CN)
LOO LI ENG (SG)
WU YILEI (CN)
YANG SHUAI (CN)
WANG CHAO (CN)
WU KE (CN)
HAN QI (CN)
LOO LI ENG (SG)
WU YILEI (CN)
YANG SHUAI (CN)
WANG CHAO (CN)
Application Number:
PCT/CN2020/130749
Publication Date:
April 21, 2022
Filing Date:
November 23, 2020
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H03H3/02; H03H9/17
Foreign References:
| CN110932694A | 2020-03-27 | |||
| CN209994354U | 2020-01-24 | |||
| CN208316692U | 2019-01-01 | |||
| CN111211757A | 2020-05-29 | |||
| CN111200414A | 2020-05-26 | |||
| CN109474255A | 2019-03-15 | |||
| CN111384907A | 2020-07-07 | |||
| US20140225683A1 | 2014-08-14 |
Attorney, Agent or Firm:
SHENZHEN JUNXINCHENG INTELLECTUAL PROPERTY FIRM (GENERAL PARTNERSHIP) (CN)
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