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Title:
THIN FILM CAPACITOR MANUFACTURING METHOD, INTEGRATED CIRCUIT MOUNTING SUBSTRATE, AND SEMICONDUCTOR DEVICE PROVIDED WITH INTEGRATED CIRCUIT MOUNTING SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2016/143087
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a thin film capacitor on a circuit board, said method including: a first electrode forming step (Fig. 3 (d)) for forming a first electrode layer (11) of a thin film capacitor in a required pattern on a dielectric film (12M) formed on a surface of a supporting member (31); a base material forming step (Fig. 3 (e)) for forming, on the dielectric film (12M) and the first electrode layer (11), an insulating base material (16) of the circuit board such that the first electrode layer (11) is embedded; a removing step for removing the supporting member (31), and exposing a dielectric film (12M) surface on the reverse side of the first electrode layer (11); a dielectric patterning step for leaving a dielectric layer overlapping the first electrode layer (11) by patterning the dielectric film (12M), and exposing a part of a first electrode layer (11) surface on the dielectric layer side by forming a first through hole in the dielectric layer; and a second electrode forming step for forming a second electrode layer of the thin film capacitor by overlapping the dielectric layer including the inside of the first through hole.

Inventors:
HATTORI Atsunori (415, Aza-Ohtsubo, Oaza-Honjo, Komaki-sh, Aichi 21, 〒4850821, JP)
Application Number:
JP2015/057143
Publication Date:
September 15, 2016
Filing Date:
March 11, 2015
Export Citation:
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Assignee:
NODA SCREEN CO., LTD. (415 Aza-Ohtsubo, Oaza-Honjo Komaki-sh, Aichi 21, 〒4850821, JP)
International Classes:
H01L23/12; H01G4/33; H01G4/38; H05K3/46
Foreign References:
JP2013089614A2013-05-13
JP2010530644A2010-09-09
JP2009043769A2009-02-26
JP2008218966A2008-09-18
JP2008112852A2008-05-15
JP2006179743A2006-07-06
JP2005252308A2005-09-15
Attorney, Agent or Firm:
AKATSUKI UNION PATENT FIRM (5th Floor, Nittochi Nagoya Bldg. 1-1, Sakae 2-chome, Naka-ku, Nagoya-sh, Aichi 08, 〒4600008, JP)
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