Title:
THIN FILM CAPACITOR AND METHOD FOR MANUFACTURING THIN FILM CAPACITOR
Document Type and Number:
WIPO Patent Application WO/2007/010681
Kind Code:
A1
Abstract:
Disclosed is a thin film capacitor comprising a capacitor unit formed on a substrate
in which capacitor unit a first conductor layer and a second conductor layer are
formed opposite to each other via a dielectric thin film; a first conductor pad
which is electrically connected with one of the first and second conductor layers
while being electrically insulated from the other conductor layer; a second
conductor pad which is electrically insulated from the one conductor layer while
being electrically connected with the other conductor layer; and first and second
bumps respectively formed on the first conductor pad and the second conductor
pad. In this thin film capacitor, the first and second conductor pads are joined
to the substrate. By having such a constitution, even when a stress occurs in a
bump in the vertical direction, the stress does not concentrate on a conductor.
Inventors:
TAKESHIMA YUTAKA (JP)
NOMURA MASANOBU (JP)
NOMURA MASANOBU (JP)
Application Number:
PCT/JP2006/311306
Publication Date:
January 25, 2007
Filing Date:
June 06, 2006
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
TAKESHIMA YUTAKA (JP)
NOMURA MASANOBU (JP)
TAKESHIMA YUTAKA (JP)
NOMURA MASANOBU (JP)
International Classes:
H01G4/33; H01G4/12; H01L21/768; H01L21/82; H01L21/822; H01L23/12; H01L27/04
Foreign References:
| JP2003197463A | 2003-07-11 | |||
| JP2001217143A | 2001-08-10 | |||
| JP2005159259A | 2005-06-16 | |||
| JP2004214589A | 2004-07-29 |
Attorney, Agent or Firm:
KUNIHIRO, Yasutoshi (14-10 Nishinakajima 5-chome, Yodogawa-k, Osaka-shi Osaka 11, JP)
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