Title:
THIN-FILM CAPACITOR AND PRODUCTION METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2019/026641
Kind Code:
A1
Abstract:
A thin-film capacitor (100) comprising: a lower electrode (120); a dielectric film (130); an upper electrode (140); a first protection film (151) that has formed therein a first through-hole (CH11) opening to the upper electrode (140) and a second through-hole (CH12) opening to the lower electrode (120), and that has a first upper surface (150A); a second protection film (152) that has a second upper surface (150B) provided at a higher position than the first upper surface 150A of the first protection film 151; a first terminal electrode (161) that is electrically connected to the upper electrode (140) via the first through-hole (CH11), and that is provided so as to extend at least to the second upper surface (150B) of the second protection film (152); and a second terminal electrode (162) that is electrically connected to the lower electrode (120) via the second through-hole (CH12), and that is provided so as to extend at least to the second upper surface (150B) of the second protection film (152).
Inventors:
KAGAWA TAKESHI (JP)
IZUMITANI JUNKO (JP)
HARADA MASATOMI (JP)
MATSUBARA HIROSHI (JP)
ISHIDA NOBUHIRO (JP)
IZUMITANI JUNKO (JP)
HARADA MASATOMI (JP)
MATSUBARA HIROSHI (JP)
ISHIDA NOBUHIRO (JP)
Application Number:
PCT/JP2018/027209
Publication Date:
February 07, 2019
Filing Date:
July 20, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L21/822; H01G4/30; H01G4/33; H01L27/04
Foreign References:
| JP2004214589A | 2004-07-29 | |||
| JP2009010114A | 2009-01-15 | |||
| JP2008004734A | 2008-01-10 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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