Title:
THIN FILM CERAMIC THERMOCOUPLES
Document Type and Number:
WIPO Patent Application WO2005112140
Kind Code:
A3
Abstract:
A thin film ceramic thermocouple (10) having two ceramic thermocouple (12, 14) that are in contact with each other in at least on point to form a junction, and wherein each element was prepared in a different oxygen/nitrogen/argon plasma. Since each element is prepared under different plasma conditions, they have different electrical conductivity and different charge carrier concentration. The thin film thermocouple (10) can be transparent. A versatile ceramic sensor system having an RTD heat flux sensor can be combined with a thermocouple and a strain sensor to yield a multifunctional ceramic sensor array. The transparent ceramic temperature sensor that could ultimately be used for calibration of optical sensors.
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Inventors:
GREGORY OTTO (US)
FRALICK GUSTAVE (US)
WRBANEK JOHN (US)
YOU TAO (US)
FRALICK GUSTAVE (US)
WRBANEK JOHN (US)
YOU TAO (US)
Application Number:
PCT/US2005/012004
Publication Date:
February 02, 2006
Filing Date:
April 12, 2005
Export Citation:
Assignee:
RHODE ISLAND EDUCATION (US)
GREGORY OTTO (US)
FRALICK GUSTAVE (US)
WRBANEK JOHN (US)
YOU TAO (US)
GREGORY OTTO (US)
FRALICK GUSTAVE (US)
WRBANEK JOHN (US)
YOU TAO (US)
International Classes:
H01L35/28; (IPC1-7): H01L35/22; G01N3/00; H01L35/28; H01L35/34
Foreign References:
| US5338566A | 1994-08-16 | |||
| US4959956A | 1990-10-02 | |||
| US5251981A | 1993-10-12 | |||
| US6729187B1 | 2004-05-04 |
Other References:
GREGORY ET AL: "Selft-Compensed Ceramic Strain Gage for use at Elevated Temperatures.", SENSORS AND ACTUATORS A., vol. 88, 2001, pages 234 - 240, XP002992998
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