Title:
THIN FILM DEPOSITION APPARATUS FOR FORMING PATTERNED ORGANIC THIN FILM
Document Type and Number:
WIPO Patent Application WO/2022/173264
Kind Code:
A1
Abstract:
Disclosed is a thin film deposition apparatus for forming a patterned thin film. The disclosed thin film deposition apparatus for forming a patterned thin film may comprise: a source container for containing a source material and producing a gaseous source material by evaporating the source material; a gas injection head for supplying the gaseous source material, which has been transferred from the source container, to a given area for forming a thin film; a susceptor disposed opposite the gas injection head and supporting a substrate mounted on the upper surface thereof; a source transfer channel array disposed between the gas injection head and the substrate mounted on the susceptor, and having an opening pattern for defining a thin film pattern formed on the substrate; and a temperature reducing means for reducing the temperature of the gaseous source material produced from the source container and transferred to the substrate by means of the gas injection head.
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Inventors:
LEE YONG EUI (KR)
LEE MYUNG GI (KR)
KOO BON YONG (KR)
KIM UN JUNG (KR)
LEE MYUNG GI (KR)
KOO BON YONG (KR)
KIM UN JUNG (KR)
Application Number:
PCT/KR2022/002175
Publication Date:
August 18, 2022
Filing Date:
February 15, 2022
Export Citation:
Assignee:
UNITEX CO LTD (KR)
International Classes:
C23C14/24; C23C14/04; C23C14/12; C23C14/22; C23C14/50; C23C14/54; H01L51/00
Foreign References:
| KR20040009579A | 2004-01-31 | |||
| KR20070083865A | 2007-08-24 | |||
| KR20200013196A | 2020-02-06 | |||
| KR20140101610A | 2014-08-20 | |||
| US20180006267A1 | 2018-01-04 |
Attorney, Agent or Firm:
KIM, Kwonseok (KR)
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