Title:
THIN-FILM DEVICE COMPRISING AN OXIDE SEMICONDUCTOR AND METHOD OF SELECTIVE ANNEALING A BLANKET COATED OXIDE SEMICONDUCTOR LAYER
Document Type and Number:
WIPO Patent Application WO2006094241
Kind Code:
A3
Abstract:
Embodiments of methods, apparatuses, devices and systems associated with a thin-film device 200 are disclosed. The properties of the thin film are modified by selective annealing a blanket coated film.
Inventors:
HOFFMAN RANDY (US)
HERMAN GREGORY S (US)
NELSON CURT (US)
HERMAN GREGORY S (US)
NELSON CURT (US)
Application Number:
PCT/US2006/007756
Publication Date:
December 14, 2006
Filing Date:
March 02, 2006
Export Citation:
Assignee:
HEWLETT PACKARD DEVELOPMENT CO (US)
HOFFMAN RANDY (US)
HERMAN GREGORY S (US)
NELSON CURT (US)
HOFFMAN RANDY (US)
HERMAN GREGORY S (US)
NELSON CURT (US)
International Classes:
H01L21/428; H01L21/20; H01L21/477; H01L29/786
Foreign References:
| US20040127038A1 | 2004-07-01 | |||
| US5946561A | 1999-08-31 | |||
| EP1209748A1 | 2002-05-29 | |||
| US20030218222A1 | 2003-11-27 |
Other References:
T. AKANE, K. SUGIOKA, K. MIDORIKAWA: "KrF Excimer Laser Induced Ohmic Metallization of ZnO Substrate", SPIE-INT. SOC. OPT. ENG., vol. 3933, 24 January 2000 (2000-01-24), USA, pages 218 - 224, XP001090588
KUCHEYEV S O ET AL: "Implant isolation of ZnO", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 93, no. 5, 1 March 2003 (2003-03-01), pages 2972 - 2976, XP012059182, ISSN: 0021-8979
HOSONO H ET AL: "Novel oxide amorphous semiconductors: Transparent conducting amorphous oxides", JOURNAL OF NON-CRYSTALLINE SOLIDS, NORTH-HOLLAND PHYSICS PUBLISHING. AMSTERDAM, NL, vol. 203, August 1996 (1996-08-01), pages 334 - 344, XP004079766, ISSN: 0022-3093
DU X ET AL: "Excimer laser annealing of p-type perovskite thin films", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. VACUUM, SURFACES AND FILMS, AMERICAN INSTITUTE OF PHYSICS, NEW YORK, NY, US, vol. 22, no. 3, May 2004 (2004-05-01), pages 870 - 873, XP012073665, ISSN: 0734-2101
PEARTON S J ET AL: "Recent advances in processing of ZnO", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B: MICROELECTRONICS PROCESSING AND PHENOMENA, AMERICAN VACUUM SOCIETY, NEW YORK, NY, US, vol. 22, no. 3, May 2004 (2004-05-01), pages 932 - 948, XP012074497, ISSN: 0734-211X
BHAUMIK G K ET AL: "Laser annealing of zinc oxide thin film deposited by spray-CVD", MATERIALS SCIENCE AND ENGINEERING B, ELSEVIER SEQUOIA, LAUSANNE, CH, vol. 52, no. 1, 6 March 1998 (1998-03-06), pages 25 - 31, XP004127131, ISSN: 0921-5107
CHANGHYUN LEE ET AL: "HIGHLY TEXTURED ZNO THIN FILMS DOPED WITH INDIUM PREPATED BY THE PYROSOL METHOD", SOLAR ENERGY MATERIALS AND SOLAR CELLS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 43, no. 1, 15 August 1996 (1996-08-15), pages 37 - 45, XP000627650, ISSN: 0927-0248
O. NENNEWITZ ET AL.: "Rapid Thermal Annealing of Thin ZnO Films", PHYS. STAT. SOL. A, vol. 145, 1994, pages 283 - 288, XP009070426
KUCHEYEV S O ET AL: "Implant isolation of ZnO", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 93, no. 5, 1 March 2003 (2003-03-01), pages 2972 - 2976, XP012059182, ISSN: 0021-8979
HOSONO H ET AL: "Novel oxide amorphous semiconductors: Transparent conducting amorphous oxides", JOURNAL OF NON-CRYSTALLINE SOLIDS, NORTH-HOLLAND PHYSICS PUBLISHING. AMSTERDAM, NL, vol. 203, August 1996 (1996-08-01), pages 334 - 344, XP004079766, ISSN: 0022-3093
DU X ET AL: "Excimer laser annealing of p-type perovskite thin films", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. VACUUM, SURFACES AND FILMS, AMERICAN INSTITUTE OF PHYSICS, NEW YORK, NY, US, vol. 22, no. 3, May 2004 (2004-05-01), pages 870 - 873, XP012073665, ISSN: 0734-2101
PEARTON S J ET AL: "Recent advances in processing of ZnO", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B: MICROELECTRONICS PROCESSING AND PHENOMENA, AMERICAN VACUUM SOCIETY, NEW YORK, NY, US, vol. 22, no. 3, May 2004 (2004-05-01), pages 932 - 948, XP012074497, ISSN: 0734-211X
BHAUMIK G K ET AL: "Laser annealing of zinc oxide thin film deposited by spray-CVD", MATERIALS SCIENCE AND ENGINEERING B, ELSEVIER SEQUOIA, LAUSANNE, CH, vol. 52, no. 1, 6 March 1998 (1998-03-06), pages 25 - 31, XP004127131, ISSN: 0921-5107
CHANGHYUN LEE ET AL: "HIGHLY TEXTURED ZNO THIN FILMS DOPED WITH INDIUM PREPATED BY THE PYROSOL METHOD", SOLAR ENERGY MATERIALS AND SOLAR CELLS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 43, no. 1, 15 August 1996 (1996-08-15), pages 37 - 45, XP000627650, ISSN: 0927-0248
O. NENNEWITZ ET AL.: "Rapid Thermal Annealing of Thin ZnO Films", PHYS. STAT. SOL. A, vol. 145, 1994, pages 283 - 288, XP009070426
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