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Title:
THIN FILM HEAT TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO1994024840
Kind Code:
A3
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Inventors:
KIM YONG-KIL (US)
Application Number:
PCT/US1994/004629
Publication Date:
January 19, 1995
Filing Date:
April 26, 1994
Export Citation:
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Assignee:
VARIAN ASSOCIATES (US)
KIM YONG KIL (US)
International Classes:
C21D1/00; H01L21/00; H01L21/22; H01L21/324
Foreign References:
US4721462A1988-01-26
US5090900A1992-02-25
US5183402A1993-02-02
US4466793A1984-08-21
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