Title:
THIN FILM MAGNETIC DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2011/148944
Kind Code:
A1
Abstract:
Disclosed is a thin film magnetic device which comprises a magnetic layer, an alcohol etchable layer, and a factor barrier layer. The magnetic layer is provided on top of a substrate. The alcohol etchable layer is provided on the magnetic layer and can be etched by alcohol plasma. The factor barrier layer is provided on the alcohol etchable layer and inhibits diffusion of factors, which deteriorate the magnetic layer, into the magnetic layer.
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Inventors:
KINOSHITA Keizo (7-1 Shiba 5-chome, Minato-k, Tokyo 01, 〒1088001, JP)
木下 啓藏 (〒01 東京都港区芝五丁目７番１号 日本電気株式会社内 Tokyo, 〒1088001, JP)
木下 啓藏 (〒01 東京都港区芝五丁目７番１号 日本電気株式会社内 Tokyo, 〒1088001, JP)
Application Number:
JP2011/061880
Publication Date:
December 01, 2011
Filing Date:
May 24, 2011
Export Citation:
Assignee:
NEC CORPORATION (7-1 Shiba 5-chome, Minato-ku Tokyo, 01, 〒1088001, JP)
日本電気株式会社 (〒01 東京都港区芝五丁目７番１号 Tokyo, 〒1088001, JP)
KINOSHITA Keizo (7-1 Shiba 5-chome, Minato-k, Tokyo 01, 〒1088001, JP)
日本電気株式会社 (〒01 東京都港区芝五丁目７番１号 Tokyo, 〒1088001, JP)
KINOSHITA Keizo (7-1 Shiba 5-chome, Minato-k, Tokyo 01, 〒1088001, JP)
International Classes:
H01L21/8246; H01F10/32; H01L27/10; H01L27/105; H01L43/08; H01L43/12; H01L45/00
Attorney, Agent or Firm:
KUDOH Minoru (6F KADOYA BLDG, 24-10 Minamiooi 6-chome, Shinagawa-k, Tokyo 13, 〒1400013, JP)
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Claims: