Title:
THIN FILM MANUFACTURING METHOD AND MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/132704
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a multilayer thin film whereby energy barrier effects due to the interface between each layer are mitigated. The method for manufacturing the thin film includes: a bottom layer forming step for forming a bottom layer containing a solute A, wherein, (1) droplets are formed by spraying a raw liquid formed by dissolving and/or dispersing a solute in a solvent, (2) the solvent in the droplets is volatilized and condensed, and (3) a thin film is formed by depositing the condensed droplets on a substrate or on a thin film disposed on a substrate, performed in that order; a top layer forming step for forming a top layer containing a solute B on the bottom layer, wherein the abovementioned steps (1) to (3) are performed sequentially; and a mixed layer forming step for forming a mixed layer containing the solutes A and B, wherein the abovementioned steps (1) to (3) are performed sequentially between the bottom layer forming step and the top layer forming step.
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Inventors:
OKI Kazuhiro (577 Ushijima, Kaisei-machi, Ashigarakami-gu, Kanagawa 77, 〒2588577, JP)
沖 和宏 (〒77 神奈川県足柄上郡開成町牛島５７７番地 富士フイルム株式会社内 Kanagawa, 〒2588577, JP)
沖 和宏 (〒77 神奈川県足柄上郡開成町牛島５７７番地 富士フイルム株式会社内 Kanagawa, 〒2588577, JP)
Application Number:
JP2011/059714
Publication Date:
October 27, 2011
Filing Date:
April 20, 2011
Export Citation:
Assignee:
FUJIFILM CORPORATION (26-30, Nishiazabu 2-chome Minato-k, Tokyo 31, 〒1060031, JP)
富士フイルム株式会社 (〒31 東京都港区西麻布２丁目２６番３０号 Tokyo, 〒1060031, JP)
OKI Kazuhiro (577 Ushijima, Kaisei-machi, Ashigarakami-gu, Kanagawa 77, 〒2588577, JP)
富士フイルム株式会社 (〒31 東京都港区西麻布２丁目２６番３０号 Tokyo, 〒1060031, JP)
OKI Kazuhiro (577 Ushijima, Kaisei-machi, Ashigarakami-gu, Kanagawa 77, 〒2588577, JP)
International Classes:
B05D1/02; B05B1/24; B05B7/04; B05B7/16; B05B7/24; H01L51/50; H05B33/10
Attorney, Agent or Firm:
SIKs & Co. (8th Floor, Kyobashi-Nisshoku Bldg. 8-7, Kyobashi 1-chome, Chuo-k, Tokyo 31, 〒1040031, JP)
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Claims:
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