Title:
THIN-FILM PIEZOELECTRIC ELEMENT, PROCESS FOR PREPARING THE SAME, AND INK JET RECORDING HEAD MADE BY USING SAID ELEMENT
Document Type and Number:
WIPO Patent Application WO/1996/020503
Kind Code:
A1
Abstract:
A thin-film piezoelectric element comprising a piezoelectric film formed of a polycrystalline material and two electrodes sandwiching the film therebetween, wherein the piezoelectric film comprises a three-component PZT having a third component content of 5 % by mole or more, has a thickness of not more than 5 'mu'm, and has a variation in Pb component of not more than U 5 % in the direction of thickness. It has good properties. Specifically, the use of the thin-film piezoelectric element enables a reduction in size of an ink jet recording head and an increase in resolution of ink jet recording. Further, the piezoelectric element can advantageously eject an ink at a high pressure and can be driven at a high frequency.
Inventors:
SHIMADA MASATO (JP)
Application Number:
PCT/JP1995/002721
Publication Date:
July 04, 1996
Filing Date:
December 27, 1995
Export Citation:
Assignee:
SEIKO EPSON CORP (JP)
SHIMADA MASATO (JP)
SHIMADA MASATO (JP)
International Classes:
B41J2/14; B41J2/16; H01L41/09; H01L41/187; (IPC1-7): H01L41/08
Foreign References:
| JPH06235268A | 1994-08-23 | |||
| JPS63238799A | 1988-10-04 | |||
| JPH0196368A | 1989-04-14 | |||
| JPH02248089A | 1990-10-03 |
Other References:
See also references of EP 0747976A4
Download PDF: