THIN FILM SOLAR CELL AND PRODUCTION METHOD THEREOF

WIPO Patent Application WO/2010/104041

A1

The disclosed production method for a thin film solar cell has a first step which forms a first electrode layer (3) having an irregularly shaped surface on a translucent insulating substrate; and a second step which forms a plurality of photoelectric conversion units on the aforementioned first electrode layer, where said plurality of photoelectric conversion units have shapes that correspond to the shape of the aforementioned first electrode layer, have a laminate structure via a middle layer, and perform photoelectric conversion. The aforementioned second step has a step which forms a first microcrystalline silicon film having a shape which corresponds to the shape of the aforementioned first electrode layer (3) on a first photoelectric conversion unit (7) out of the aforementioned plurality of photoelectric conversion units; a step which oxidizes the aforementioned first microcrystalline silicon film, forming a first conductive oxidized silicon film on the aforementioned first photoelectric conversion unit (7); and a step which forms a second photoelectric conversion unit (12) out of the aforementioned plurality of photoelectric conversion units on the aforementioned middle layer (8).

ORITA TAE (JP)
YAMAMUKA MIKIO (JP)
TOKIOKA HIDETADA (JP)

PCT/JP2010/053803

September 16, 2010

March 08, 2010

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MITSUBISHI ELECTRIC CORP (JP)
ORITA TAE (JP)
YAMAMUKA MIKIO (JP)
TOKIOKA HIDETADA (JP)

H01L31/04

WO2007074683A1

2007-07-05

JP2000138384A	2000-05-16
JP2003298088A	2003-10-17
JP2001274430A	2001-10-05
JPH0282582A	1990-03-23
JPS63127584A	1988-05-31
JPH0595126A	1993-04-16
JP2004179371A	2004-06-24

SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)

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