Title:
THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, ARRAY SUBSTRATE, AND DISPLAY APPARATUS
Document Type and Number:
WIPO Patent Application WO/2016/112611
Kind Code:
A1
Abstract:
Provided are a thin film transistor (TFT) and manufacturing method thereof, array substrate, and display apparatus. The TFT comprises a gate electrode, an active layer, a source electrode, and a drain electrode formed on a substrate, the active layer comprises an oxide having dopant ions, the dopant ions have a p-groove electronic arrangement structure, and p-orbital energy level of the dopant ions is higher than 2p-orbital energy level of oxygen ions in the oxide, such that the top of the doped valence band of the active layer is higher than the energy level of oxygen vacancies formed in the active layer. The active layer of the TFT is made from the oxide having dopant ions, improving the stability of the TFT.
Inventors:
WANG MEILI (CN)
Application Number:
PCT/CN2015/079162
Publication Date:
July 21, 2016
Filing Date:
May 18, 2015
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
International Classes:
H01L29/786; H01L21/336; H01L21/77
Foreign References:
| CN104538457A | 2015-04-22 | |||
| CN104319293A | 2015-01-28 | |||
| CN104752516A | 2015-07-01 | |||
| CN103560147A | 2014-02-05 | |||
| KR20120064256A | 2012-06-19 | |||
| CN103500710A | 2014-01-08 | |||
| CN103545221A | 2014-01-29 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
北京天昊联合知识产权代理有限公司 (CN)
北京天昊联合知识产权代理有限公司 (CN)
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