Title:
THREAD GROOVE VACUUM PUMP, AND EVACUATION SYSTEM USING SAME
Document Type and Number:
WIPO Patent Application WO/2013/008519
Kind Code:
A1
Abstract:
Provided is a thread groove vacuum pump with increased exhaust velocity such that exhaust performance can be improved. A casing (11) with an inlet port (12) and an exhaust port (13) houses: a rotor shaft (14) rotatably supported on an axis by bearings (23) and a rotation drive mechanism; rotating cylinder portions (27a, 27b) joined to the rotor shaft (14) via flange-shaped support plate portions (26) concentrically such that the rotating cylinder portions (27a, 27b) can be rotated integrally with the rotor shaft (14); and two stator members (17, 17) disposed on the side of the rotating cylinder portions (27a, 27b) and facing each other via a predetermined gap. On the side of the stator members (17, 17) facing the rotating cylinder portions (27a, 27b), thread grooves (25) are formed for transporting gaseous molecules from the inlet port (12) to the exhaust port (13) in accordance with the rotation of the rotor shaft (14). At least two thread groove exhaust mechanisms including communication holes (28) formed in the support plate portions (26) for providing communication between the inlet port (12) or the exhaust port (13) and the thread grooves (25) are disposed with a predetermined axial interval on the rotor shaft (14). The inlet port (12) is disposed between the thread groove exhaust mechanisms.
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| JP5189729 | Vacuum pump |
| WO/2008/081030 | METHOD FOR DETERMINATION OF RESONANT FREQUENCIES OF A ROTOR USING MAGNETIC BEARINGS |
| WO/1999/032792 | MOLECULAR VACUUM PUMP |
Inventors:
NONAKA MANABU (JP)
KABASAWA TAKASHI (JP)
MATSUO TAKUYA (JP)
KABASAWA TAKASHI (JP)
MATSUO TAKUYA (JP)
Application Number:
PCT/JP2012/061633
Publication Date:
January 17, 2013
Filing Date:
May 07, 2012
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
NONAKA MANABU (JP)
KABASAWA TAKASHI (JP)
MATSUO TAKUYA (JP)
NONAKA MANABU (JP)
KABASAWA TAKASHI (JP)
MATSUO TAKUYA (JP)
International Classes:
F04D19/04
Foreign References:
| JPS6340598U | 1988-03-16 | |||
| JP2011033026A | 2011-02-17 | |||
| JPH0647238A | 1994-02-22 | |||
| JPH046593U | 1992-01-21 | |||
| JPS63147990A | 1988-06-20 | |||
| JP2006046074A | 2006-02-16 | |||
| JPH04370394A | 1992-12-22 | |||
| JP2007518010A | 2007-07-05 |
Attorney, Agent or Firm:
HAYASHI TAKAYOSHI (JP)
Wood Kokichi (JP)
Wood Kokichi (JP)
Download PDF:
Claims:
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