Title:
THREE-AXIS GYROSCOPE
Document Type and Number:
WIPO Patent Application WO/2024/036688
Kind Code:
A1
Abstract:
Provided in the present application is a three-axis gyroscope. The three-axis gyroscope comprises a driving structure, a first sensitive structure, a second sensitive structure, a third sensitive structure and a plurality of anchoring structures, wherein the driving structure is used for driving the three-axis gyroscope, the first sensitive structure is configured to be sensitive to an angular velocity in a first direction, the second sensitive structure is configured to be sensitive to an angular velocity in a second direction, and the third sensitive structure is configured to be sensitive to an angular velocity in a third direction. A first sensitive structure, a second sensitive structure and a third sensitive structure are independent of each other, and can be decoupled from each other in a first detection mode, a second detection mode and a third detection mode, such that a coupling error can be effectively prevented; and in the first detection mode, the second detection mode or the third detection mode, electrical orthogonal suppression and capacitive mode matching are both taken into consideration, such that a structural performance loss caused by asymmetric machining can be compensated for, and orthogonal errors are reduced, thereby improving the measurement precision and the overall performance of the three-axis gyroscope.
Inventors:
ZHAN ZHAN (CN)
MA ZHAO (CN)
KAN XIAO (CN)
YAN SHITAO (CN)
YANG SHAN (CN)
TAN VERONICA (SG)
LI YANG (CN)
LAI KAH KEEN (CN)
MA ZHAO (CN)
KAN XIAO (CN)
YAN SHITAO (CN)
YANG SHAN (CN)
TAN VERONICA (SG)
LI YANG (CN)
LAI KAH KEEN (CN)
Application Number:
PCT/CN2022/119632
Publication Date:
February 22, 2024
Filing Date:
September 19, 2022
Export Citation:
Assignee:
AAC KAITAI TECH WUHAN CO LTD (CN)
International Classes:
G01C19/5712; G01C19/5656
Foreign References:
| CN113959423A | 2022-01-21 | |||
| CN217155417U | 2022-08-09 | |||
| CN112739982A | 2021-04-30 | |||
| CN107782296A | 2018-03-09 | |||
| CN216309014U | 2022-04-15 | |||
| CN114719834A | 2022-07-08 | |||
| CN107179074A | 2017-09-19 | |||
| CN113203404A | 2021-08-03 | |||
| US20180216935A1 | 2018-08-02 |
Attorney, Agent or Firm:
UNI-INTEL PATENT AND TRADEMARK LAW FIRM (CN)
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