Title:
THREE-DIMENSIONAL ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2010/146818
Kind Code:
A1
Abstract:
Acceleration detection piezo-resistance elements (x1 to x4), (y1 to y4), and (z1 to z4) in the X-axis direction, Y-axis direction, and the Z-axis direction, respectively, of a three-dimensional acceleration sensor (10) are formed in the longitudinal directions of beams (14a), (14b), (14c), and (14d), correspondingly. In addition to the above, sensitivity adjustment piezo-resistance elements (21 to 24) are formed in such directions as to intersect the longitudinal directions of beams (14a) and (14c), correspondingly, approximately at right angles. Furthermore, piezo-resistance elements (21 to 24) are electrically connected to acceleration detection piezo-resistance elements (x1 to x4), respectively.
Inventors:
NAGAWATARI MINORU
Application Number:
PCT/JP2010/003910
Publication Date:
December 23, 2010
Filing Date:
June 11, 2010
Export Citation:
Assignee:
MITSUMI ELECTRIC CO LTD (JP)
NAGAWATARI MINORU
NAGAWATARI MINORU
International Classes:
G01P15/18; G01P15/12; G01P21/00; H01L29/84
Foreign References:
| JP2006098321A | 2006-04-13 | |||
| JP2007199081A | 2007-08-09 |
Attorney, Agent or Firm:
WASHIDA, KIMIHITO (JP)
Koichi Washida (JP)
Koichi Washida (JP)
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