Title:
THREE-DIMENSIONAL CONTINUOUS LASER PROCESSING DEVICE FOR LARGE AREA
Document Type and Number:
WIPO Patent Application WO/2018/151378
Kind Code:
A1
Abstract:
The present invention relates to a three-dimensional continuous laser processing device for a large area, the device coupling a five-axis stage and a three-axis laser scanner so as to perform a three-dimensional continuous processing operation, thereby being capable of performing continuous patterning work on an object to be processed having a large area, and the present invention comprises: a path generating unit for generating a scan path of the object to be processed; a galvano scanner emitting lasers so as to process a surface of the object to be processed; a five-axis stage unit including a stage having an upper surface on which the object to be processed is arranged, performing, on the stage, a movement in the X-axis direction, a movement in the Y-axis direction orthogonal to the X-axis, and a movement in the Z-axis direction orthogonal to the X-axis and the Y-axis, a tilting movement of the plane formed by the X-axis and the Y-axis, and a rotational movement around the C-axis orthogonal to the rotational axis of the tilting movement, and generating position information of the stage; an encoder distribution unit for distributing, as feedback information, the position information of the stage from the five-axis stage; and a control unit for controlling the five-axis stage unit and the galvano scanner on the basis of the scan path and the feedback information distributed by the encoder distribution unit.
Inventors:
LEE CHEOL-SOO (KR)
KIM DONG-SOO (KR)
CHOI IN-HUGH (KR)
KIM DONG-SOO (KR)
CHOI IN-HUGH (KR)
Application Number:
PCT/KR2017/006346
Publication Date:
August 23, 2018
Filing Date:
June 16, 2017
Export Citation:
Assignee:
CSCAM CORP (KR)
International Classes:
B23K26/00; B23K26/08; B23K26/359
Foreign References:
| KR20160143286A | 2016-12-14 | |||
| KR101599861B1 | 2016-03-04 | |||
| KR101322234B1 | 2013-10-28 | |||
| JP2016010819A | 2016-01-21 | |||
| US20120187103A1 | 2012-07-26 |
Attorney, Agent or Firm:
DAWOOL PATENT AND LAW FIRM (KR)
Download PDF: