THREE-DIMENSIONAL MEASUREMENT DEVICE

Title:

THREE-DIMENSIONAL MEASUREMENT DEVICE

Document Type and Number:

WIPO Patent Application WO/2016/190151

Kind Code:

A1

Abstract:

Provided is a three-dimensional measurement device that is capable of achieving an enlargement of the measurement range and an improvement in the measurement efficiency by utilizing two types of light of differing wavelengths. The three-dimensional measurement device 1 comprises: a polarized light beam splitter 20 that can split a predetermined incident light beam into two polarized light beams having mutually orthogonal polarization directions, emit one onto a workpiece W as measurement light, emit the other onto a reference surface 23 as reference light, and recombine the light beams and emit the same; a first projection system 2A that makes a first light beam having a first wavelength incident on a first surface 20a of this polarized light beam splitter 20; a second projection system 2B that makes a second light beam having a second wavelength incident on a second surface 20b of the polarized light beam splitter 20; a first image capture system 4A that can capture an image of the first light beam emitted from the second surface 20b of the polarized light beam splitter 20; and a second image capture system 4B that can capture an image of the second light beam emitted from the first surface 20a of the polarized light beam splitter 20.

Inventors:

ISHIGAKI HIROYUKI (JP)
MAMIYA TAKAHIRO (JP)

Application Number:

PCT/JP2016/064465

Publication Date:

December 01, 2016

Filing Date:

May 16, 2016

Export Citation:

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Assignee:

CKD CORP (JP)

International Classes:

G01B11/24; G01B9/02

Foreign References:

JP2000074618A	2000-03-14
JP2010164389A	2010-07-29
JP2006126192A	2006-05-18
JP2001227927A	2001-08-24
JP2000310518A	2000-11-07
JP2007093288A	2007-04-12
JP2013238850A	2013-11-28
JPH11211417A	1999-08-06
JP2006308594A	2006-11-09

Other References: