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Title:
THREE-DIMENSIONAL MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/203668
Kind Code:
A1
Abstract:
Provided is a three-dimensional measurement device that, when measuring height using a phase shift method, uses light of a plurality of differing periods to broaden a measurement range and shorten a measurement time. A substrate inspection device 1 is provided with an illumination device 4 capable of irradiating two light patterns onto a printed circuit board 2 from diagonally above, a camera 5 for imaging the part of the printed circuit board 2 onto which the light patterns are irradiated, and a control device 6 for carrying out various control, image processing, and calculation in the substrate inspection device 1. The control device 6 acquires a first height measurement value from image data obtained from the irradiation of a first light pattern having a first period and acquires gain and offset values from the image data. Next, the control device 6 uses the gain and offset values to acquire a second height measurement value from image data obtained by irradiating a second light pattern having a second period. The control device 6 acquires height data specified on the basis of the first measurement value and second measurement value as true height data.

Inventors:
OHYAMA TSUYOSHI (JP)
SAKAIDA NORIHIKO (JP)
MAMIYA TAKAHIRO (JP)
ISHIGAKI HIROYUKI (JP)
Application Number:
PCT/JP2015/082098
Publication Date:
December 22, 2016
Filing Date:
November 16, 2015
Export Citation:
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Assignee:
CKD CORP (JP)
International Classes:
G01B11/02
Foreign References:
JP2012053015A2012-03-15
JP2013124938A2013-06-24
Attorney, Agent or Firm:
KAWAGUCHI MITSUO (JP)
Mitsuo Kawaguchi (JP)
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