THREE-DIMENSIONAL MEASUREMENT DEVICE

WIPO Patent Application WO/2019/111453

A1

Provided is a three-dimensional measurement device capable of enhancing measurement accuracy and measurement efficiency. This three-dimensional measurement device 1 uses an interference fringe image obtained through imaging by imaging systems 4A, 4B to acquire, at a prescribed measurement range interval, a plurality of sets of intensity image data for each coordinate position in a prescribed measurement region on a workpiece W at prescribed positions in the optical axis direction. Next, the three-dimensional measurement device 1 determines the optical-axis-direction focal positions at each coordinate position on the basis of the plurality of sets of intensity image data and specifies orders corresponding to the optical-axis-direction focal positions as orders for the coordinate positions. Further, the three-dimensional measurement device 1 acquires light phase information for the optical-axis-direction focal positions at each coordinate position in the measurement region and carries out three-dimensional measurement of the coordinate positions on the basis of the phase information for the coordinate positions and the orders for the coordinate positions.

ISHIGAKI HIROYUKI (JP)
MAMIYA TAKAHIRO (JP)

PCT/JP2018/031883

June 13, 2019

August 29, 2018

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CKD CORP (JP)

G01B11/24; G06T7/521

JP2017053832A	2017-03-16
JP2017125707A	2017-07-20
JP2014001965A	2014-01-09
JP2012083233A	2012-04-26
US5777742A	1998-07-07

TONOOKA, MASAHITO ET AL.: "Surface Profile Measurement by Phase and Contrast Detection using Grating Projection Method", JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING, vol. 66, no. 1, 5 January 2000 (2000-01-05), pages 132 - 136

KAWAGUCHI Mitsuo (JP)

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