THREE-DIMENSIONAL MEASUREMENT DEVICE

WIPO Patent Application WO/2022/180938

A1

Provided is a three-dimensional measurement device capable of, e.g., enhancing measurement accuracy. This three-dimensional measurement device 1 comprises: an interference optical system 3 that comprises a half mirror HM for splitting incident light into two light beams, emits one split light beam onto a workpiece W, emits the other split light beam onto a reference surface 23, and recombines and emits same; a first light projection system 2A that emits first light of a first wavelength toward the half mirror HM; a second light projection system 2B that emits second light of a second wavelength toward the half mirror HM; a first imaging system 4A that images output light of the first light emitted from the half mirror HM; and a second imaging system 4B that images output light of the second light emitted from the half mirror HM. The three-dimensional measurement device 1 three dimensionally measures the workpiece W on the basis of image data acquired by the imaging systems 4A, 4B. The directions in which the first light and second light travel toward the workpiece W are different. The directions in which the first light and second light travel toward the reference surface 23 are different.

ISHIGAKI HIROYUKI (JP)
OKADA TOMORU (JP)
FUTAMURA IKUO (JP)
MAMIYA TAKAHIRO (JP)
HAYASAKI YOSHIO (JP)

PCT/JP2021/040805

September 01, 2022

November 05, 2021

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CKD CORP (JP)
UNIV UTSUNOMIYA (JP)

G01B11/24

WO2016190151A1

2016-12-01

JPH08304027A	1996-11-22
US20060180761A1	2006-08-17

KAWAGUCHI Mitsuo (JP)

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