Title:
THREE-DIMENSIONAL MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/061274
Kind Code:
A1
Abstract:
Provided is a three-dimensional measuring device with which light having different wavelengths can be used to enlarge a measuring range and improve measuring efficiency. A three-dimensional measuring device 1 is provided with: a polarizing beam splitter 20 capable of splitting incident predetermined light into two polarized light beams having mutually orthogonal polarization directions, radiating one of the light beams as measurement light onto a workpiece W and radiating the other light beam as reference light onto a reference surface 23, and recombining and emitting the light beams; a first light projecting system 2A which causes first light to be incident on a first surface 20a of the polarizing beam splitter 20; a second light projecting system 2B which causes second light to be incident on a second surface 20b of the polarizing beam splitter 20; a first imaging system 4A capable of capturing an image of the first light emitted from the first surface 20a of the polarizing beam splitter 20; and a second imaging system 4B capable of capturing an image of the second light emitted from the second surface 20b of the polarizing beam splitter 20.
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Inventors:
ISHIGAKI HIROYUKI (JP)
MAMIYA TAKAHIRO (JP)
MAMIYA TAKAHIRO (JP)
Application Number:
PCT/JP2017/015696
Publication Date:
April 05, 2018
Filing Date:
April 19, 2017
Export Citation:
Assignee:
CKD CORP (JP)
International Classes:
G01B11/00; G01B9/02
Foreign References:
| JP2010112768A | 2010-05-20 | |||
| JPH0894317A | 1996-04-12 | |||
| JP2002202108A | 2002-07-19 | |||
| JP2000074618A | 2000-03-14 | |||
| JP2010164389A | 2010-07-29 |
Other References:
See also references of EP 3521749A4
Attorney, Agent or Firm:
KAWAGUCHI Mitsuo (JP)
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