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Title:
THREE-DIMENSIONAL MEMORY DEVICE WITH CORROSION-RESISTANT COMPOSITE SPACER
Document Type and Number:
WIPO Patent Application WO/2020/019149
Kind Code:
A1
Abstract:
Embodiments of a three-dimensional (3D) memory device with a corrosion-resistant composite spacer and method for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a memory stack disposed on the substrate and including a plurality of conductor/dielectric layer pairs, a plurality of memory strings each extending vertically through the memory stack, a slit contact disposed laterally between the plurality of memory strings, and a composite spacer disposed laterally between the slit contact and at least one of the memory strings. The composite spacer includes a first silicon oxide film, a second silicon oxide film, and a dielectric film disposed laterally between the first silicon oxide film and the second silicon oxide film.

Inventors:
XU, Bo (Room 7018, No.18 Huaguang Road, Guandong Science and Technology Industrial Park,East Lake High-Tech Development Zon, Wuhan Hubei 4, 430074, CN)
YAN, Ping (Room 7018, No.18 Huaguang Road, Guandong Science and Technology Industrial Park,East Lake High-Tech Development Zon, Wuhan Hubei 4, 430074, CN)
YANG, Chuan (Room 7018, No.18 Huaguang Road, Guandong Science and Technology Industrial Park,East Lake High-Tech Development Zon, Wuhan Hubei 4, 430074, CN)
GAO, Jing (Room 7018, No.18 Huaguang Road, Guandong Science and Technology Industrial Park,East Lake High-Tech Development Zon, Wuhan Hubei 4, 430074, CN)
HUO, Zongliang (Room 7018, No.18 Huaguang Road, Guandong Science and Technology Industrial Park,East Lake High-Tech Development Zon, Wuhan Hubei 4, 430074, CN)
ZHANG, Lu (Room 7018, No.18 Huaguang Road, Guandong Science and Technology Industrial Park,East Lake High-Tech Development Zon, Wuhan Hubei 4, 430074, CN)
Application Number:
CN2018/096783
Publication Date:
January 30, 2020
Filing Date:
July 24, 2018
Export Citation:
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Assignee:
YANGTZE MEMORY TECHNOLOGIES CO., LTD. (Room 7018, No.18 Huaguang Road, Guandong Science and Technology Industrial Park,East Lake High-Tech Development Zon, Wuhan Hubei 4, 430074, CN)
International Classes:
H01L27/11524
Foreign References:
CN107968091A2018-04-27
US20130248974A12013-09-26
US20160056167A12016-02-25
US20160247816A12016-08-25
Attorney, Agent or Firm:
NTD UNIVATION INTELLECTUAL PROPERTY AGENCY LTD. (10th Floor, Tower C Beijing Global Trade Center,36 North Third Ring Road East, Dongcheng District, Beijing 3, 100013, CN)
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