Title:
THREE-DIMENSIONAL MICROSTRUCTURE, METHOD FOR MANUFACTURING THE MICROSTRUCTURE, AND APPARATUS FOR MANUFACTURING THE MICROSTRUCTURE
Document Type and Number:
WIPO Patent Application WO/2008/062634
Kind Code:
A1
Abstract:
This invention provides a three-dimensional microstructure, a method for manufacturing
the microstructure, and an apparatus for manufacturing the microstructure.
In one embodiment of the manufacturing method, a mold with a fine pattern formed
on the surface of a fibrous core material is manufactured. A metal is filled into
the pattern by plating, and the mold is then removed. In a suitable embodiment,
a fibrous core material with a resist layer formed on its surface is inserted into
a cylindrical hole in a cylindrical mask, for photolithography, comprising
a non-light-transparent mask pattern formed in a light transparent cylindrical
shell. A laser beam is applied from the outer side of the cylindrical mask to a
part of the cylindrical shell or the whole cylindrical shell at a time. Thereafter,
the resist layer is developed to manufacture a mold.
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Inventors:
WANG QING (JP)
GOTO HIROSHI (JP)
MAEDA RYUTARO (JP)
KITA TOSHIAKI (JP)
GOTO HIROSHI (JP)
MAEDA RYUTARO (JP)
KITA TOSHIAKI (JP)
Application Number:
PCT/JP2007/070875
Publication Date:
May 29, 2008
Filing Date:
October 26, 2007
Export Citation:
Assignee:
NANO CRAFT TECHNOLOGIES CO (JP)
KITA MFG CO LTD (JP)
WANG QING (JP)
GOTO HIROSHI (JP)
MAEDA RYUTARO (JP)
KITA TOSHIAKI (JP)
KITA MFG CO LTD (JP)
WANG QING (JP)
GOTO HIROSHI (JP)
MAEDA RYUTARO (JP)
KITA TOSHIAKI (JP)
International Classes:
B81C99/00; C23C18/31; C25D1/02
Foreign References:
| JPH0649670A | 1994-02-22 | |||
| JP2000147229A | 2000-05-26 | |||
| JP2006226327A | 2006-08-31 | |||
| JPH11340129A | 1999-12-10 | |||
| JPH0971882A | 1997-03-18 | |||
| JPH0683036A | 1994-03-25 | |||
| JPH04262132A | 1992-09-17 |
Attorney, Agent or Firm:
KAWAMORITA, Koki (T24 Building 4F 2-45 Aom, Koto-ku Tokyo 73, JP)
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