THREE-DIMENSIONAL SURFACE POTENTIAL DISTRIBUTION MEASUREMENT SYSTEM - TOSHIBA MITSUBISHI-ELECTRIC IND SYSTEMS CORP

Title:

THREE-DIMENSIONAL SURFACE POTENTIAL DISTRIBUTION MEASUREMENT SYSTEM

Document Type and Number:

WIPO Patent Application WO/2017/138034

Kind Code:

A1

Abstract:

This three-dimensional surface potential distribution measurement system (100) for measuring the surface potential of an object of measurement is provided with a laser light source, a Pockels crystal having a Pockels effect in which the refractive index changes as a result of variation in the potential difference between a first end surface and second end surface, a mirror provided so as to come into contact with the second end surface, a photodetector for detecting the intensity of laser light corresponding to the potential difference of the Pockels crystal, a housing (31) for holding the above, a three-dimensional motion-driving device (30) capable of three-dimensionally driving the motion of the housing (31), and a driving control unit (50) for controlling the three-dimensional motion-driving device (30).

More Like This:

JP2624205	CURRENT PROBE
JP2680211	ELECTROMAGNETIC WAVE SHIELDING INSPECTION METHOD OF ELECTRONIC APPARATUS AND INSPECTION JIG USED THEREFOR

Inventors:

FURUKAWA MASAAKI (JP)
YOSHIMITSU TETSUO (JP)
TSUBOI YUICHI (JP)
HIDAKA KUNIHIKO (JP)
KUMADA AKIKO (JP)
IKEDA HISATOSHI (JP)

Application Number:

PCT/JP2016/000643

Publication Date:

August 17, 2017

Filing Date:

February 08, 2016

Export Citation:

Click for automatic bibliography generation Help

Assignee:

TOSHIBA MITSUBISHI-ELECTRIC IND SYSTEMS CORP (JP)
UNIV TOKYO (JP)

International Classes:

G01R29/08; G01R31/34

Domestic Patent References:

WO2014147660A1

2014-09-25

Foreign References:

JPH04213082A	1992-08-04
JPH068174A	1994-01-18
JP2013113637A	2013-06-10

Other References: