Title:
TILT CORRECTION DEVICE, MACHINING DEVICE AND TILT CORRECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/241753
Kind Code:
A1
Abstract:
A machining device (1) is provided with: a mounting surface of a mounting table (26) on which a machining target (4) is mounted; a bottom surface that presses the mounted machining target (4); a camera device (32) that photographs the mounting surface of the mounting table (26) and generates image data of an image of the mounting surface of the mounting table (26); an image processing device that processes the image data and calculates a correction direction and a correction amount for correcting the tilt between the mounting surface of the mounting table (26) and the bottom surface; and a correction processing device that changes the tilt of at least one of the mounting surface of the mounting table (26) and the bottom surface, in accordance with the calculated correction direction and correction amount, and corrects the tilt of the mounting surface of the mounting table (26) and the bottom surface to fall within a predetermined range.
Inventors:
TOKU YUKIHIRO (JP)
MAEZONO SHUICHI (JP)
MAEZONO SHUICHI (JP)
Application Number:
PCT/JP2020/021114
Publication Date:
December 03, 2020
Filing Date:
May 28, 2020
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G06T7/00; G06T7/70; H01L21/52; H01L21/60; H05K13/04; H05K13/08
Foreign References:
| JP2001308597A | 2001-11-02 | |||
| JP2004207569A | 2004-07-22 | |||
| JP2018144078A | 2018-09-20 |
Attorney, Agent or Firm:
KIMURA Mitsuru (JP)
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