Title:
TIN COMPOUND, STARTING MATERIAL FOR FORMING THIN FILM, THIN FILM, METHOD FOR PRODUCING THIN FILM, AND HALOGEN COMPOUND
Document Type and Number:
WIPO Patent Application WO/2022/196491
Kind Code:
A1
Abstract:
The present invention provides a tin compound which is represented by general formula (1). (In formula (1), each of R1 and R2 independently represents an alkyl group having 1 to 5 carbon atoms or an alkylsilyl group having 3 to 12 carbon atoms; each of R3 and R4 independently represents an alkyl group having 1 to 5 carbon atoms; and R5 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms.)
Inventors:
YOSHINO TOMOHARU (JP)
YAMASHITA ATSUSHI (JP)
OOE YOSHIKI (JP)
YAMASHITA ATSUSHI (JP)
OOE YOSHIKI (JP)
Application Number:
PCT/JP2022/010299
Publication Date:
September 22, 2022
Filing Date:
March 09, 2022
Export Citation:
Assignee:
ADEKA CORP (JP)
International Classes:
C07F7/22; H01L21/31; H01L21/312; C07C257/14; C07F7/10
Domestic Patent References:
| WO2018062590A1 | 2018-04-05 |
Foreign References:
| JP2012514635A | 2012-06-28 |
Other References:
AHMET IBRAHIM Y., HILL MICHAEL S., RAITHBY PAUL R., JOHNSON ANDREW L.: "Tin guanidinato complexes: oxidative control of Sn, SnS, SnSe and SnTe thin film deposition", DALTON TRANSACTIONS, RSC - ROYAL SOCIETY OF CHEMISTRY, CAMBRIDGE, vol. 47, no. 14, 1 January 2018 (2018-01-01), Cambridge , pages 5031 - 5048, XP055967883, ISSN: 1477-9226, DOI: 10.1039/C8DT00773J
ÁLVAREZ-RODRÍGUEZ LUCÍA, CABEZA JAVIER A., GARCÍA-ÁLVAREZ PABLO, POLO DIEGO: "Organic Amides as Suitable Precursors to Stabilize Stannylenes", ORGANOMETALLICS, AMERICAN CHEMICAL SOCIETY, vol. 32, no. 12, 24 June 2013 (2013-06-24), pages 3557 - 3561, XP055967879, ISSN: 0276-7333, DOI: 10.1021/om400476c
SODREAU ALEXANDRE, LENTZ NICOLAS, FRUTOS MARIA, MALLET-LADEIRA SONIA, NAYRAL CéLINE, DELPECH FABIEN, MADEC DAVID: "Symmetric and non-symmetric bis-metallylene iron complexes, precursors of iron germanide nanoparticles", CHEMICAL COMMUNICATIONS, ROYAL SOCIETY OF CHEMISTRY, UK, vol. 55, no. 64, 7 August 2019 (2019-08-07), UK , pages 9539 - 9542, XP055813115, ISSN: 1359-7345, DOI: 10.1039/C9CC05063A
ÁLVAREZ-RODRÍGUEZ LUCÍA, CABEZA JAVIER A., GARCÍA-ÁLVAREZ PABLO, POLO DIEGO: "Organic Amides as Suitable Precursors to Stabilize Stannylenes", ORGANOMETALLICS, AMERICAN CHEMICAL SOCIETY, vol. 32, no. 12, 24 June 2013 (2013-06-24), pages 3557 - 3561, XP055967879, ISSN: 0276-7333, DOI: 10.1021/om400476c
SODREAU ALEXANDRE, LENTZ NICOLAS, FRUTOS MARIA, MALLET-LADEIRA SONIA, NAYRAL CéLINE, DELPECH FABIEN, MADEC DAVID: "Symmetric and non-symmetric bis-metallylene iron complexes, precursors of iron germanide nanoparticles", CHEMICAL COMMUNICATIONS, ROYAL SOCIETY OF CHEMISTRY, UK, vol. 55, no. 64, 7 August 2019 (2019-08-07), UK , pages 9539 - 9542, XP055813115, ISSN: 1359-7345, DOI: 10.1039/C9CC05063A
Attorney, Agent or Firm:
SOGA, Michiharu et al. (JP)
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