Title:
TIO2-CONTAINING QUARTZ-GLASS SUBSTRATE FOR AN IMPRINT MOLD AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2012/008343
Kind Code:
A1
Abstract:
The disclosed TiO2-containing quartz-glass substrate for an imprint mold has a principal surface and a side surface. The arithmetic-mean roughness (Ra) of the side surface is 1 nm or less and the root mean square of the frequency roughness of the side surface between 10 µm and 1 mm (MSFR_rms) is 10 nm or less.
Inventors:
KOIKE Akio (Limited. 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
小池 章夫 (〒05 東京都千代田区有楽町一丁目１２番１号 旭硝子株式会社内 Tokyo, 〒1008405, JP)
MIYASAKA Junko (Limited. 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
小池 章夫 (〒05 東京都千代田区有楽町一丁目１２番１号 旭硝子株式会社内 Tokyo, 〒1008405, JP)
MIYASAKA Junko (Limited. 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
Application Number:
JP2011/065497
Publication Date:
January 19, 2012
Filing Date:
July 06, 2011
Export Citation:
Assignee:
Asahi Glass Company, Limited. (5-1 Marunouchi 1-chome, Chiyoda-ku Tokyo, 05, 〒1008405, JP)
旭硝子株式会社 (〒05 東京都千代田区丸の内一丁目５番１号 Tokyo, 〒1008405, JP)
KOIKE Akio (Limited. 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
小池 章夫 (〒05 東京都千代田区有楽町一丁目１２番１号 旭硝子株式会社内 Tokyo, 〒1008405, JP)
旭硝子株式会社 (〒05 東京都千代田区丸の内一丁目５番１号 Tokyo, 〒1008405, JP)
KOIKE Akio (Limited. 12-1, Yurakucho 1-chome, Chiyoda-k, Tokyo 05, 〒1008405, JP)
小池 章夫 (〒05 東京都千代田区有楽町一丁目１２番１号 旭硝子株式会社内 Tokyo, 〒1008405, JP)
International Classes:
B29C59/02; B29C33/38; C03B20/00; C03C3/06; C03C3/076; C03C19/00
Attorney, Agent or Firm:
OGURI Shohei et al. (Eikoh Patent Firm, Toranomon East Bldg. 10F7-13, Nishi-Shimbashi 1-chom, Minato-ku Tokyo 03, 〒1050003, JP)
Claims: