Title:
TITANIUM ALLOY VACUUM CONTAINER AND VACUUM PART
Document Type and Number:
WIPO Patent Application WO/2002/083286
Kind Code:
A1
Abstract:
A titanium alloy vacuum container and a vacuum part capable of easily achieving an ultra high vacuum by evacuation in a short time, wherein a structure is finely refined to approx. 10$g(m)m or below and at least the surface roughness of the surface thereof exposed to vacuum is 50 nm or below, desirably the surface roughness should be 10 nm or below, hardness should be 230 to 310 Hv, and a passive state film such as a thin titanium oxidation zone or a nitrided zone may be formed on the surface, and the titanium alloy desirable for the vacuum container and the vacuum part is a titanium alloy formed with an iron of 0.3 to 0.5 wt%, an oxygen of 0.3 to 0.5 wt%, and the rest of Ti and unavoidable impurities.
Inventors:
KURISU HIROKI (JP)
MATSUURA MITSURU (JP)
YAMAMOTO SETSUO (JP)
HESAKA MASAKI (JP)
TAKEMURA ATSUSHI (JP)
MATSUURA MITSURU (JP)
YAMAMOTO SETSUO (JP)
HESAKA MASAKI (JP)
TAKEMURA ATSUSHI (JP)
Application Number:
PCT/JP2002/002566
Publication Date:
October 24, 2002
Filing Date:
March 18, 2002
Export Citation:
Assignee:
KURISU HIROKI (JP)
MATSUURA MITSURU (JP)
YAMAMOTO SETSUO (JP)
HESAKA MASAKI (JP)
TAKEMURA ATSUSHI (JP)
MATSUURA MITSURU (JP)
YAMAMOTO SETSUO (JP)
HESAKA MASAKI (JP)
TAKEMURA ATSUSHI (JP)
International Classes:
B01J3/03; C22C14/00; C23C8/12; C23C8/16; B01J3/00; C23C16/44; (IPC1-7): B01J3/00; B01J3/03; H01L21/205; H01L21/203
Foreign References:
| JPH10265935A | 1998-10-06 | |||
| JPH0953163A | 1997-02-25 | |||
| JPH04249674A | 1992-09-04 |
Other References:
See also references of EP 1374984A4
Attorney, Agent or Firm:
Takagi, Yoshiteru (23-26 Edobori 1-chome, Nishi-k, Osaka-shi Osaka, JP)
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