Title:
TOP-DOWN SUBLIMATION ARRANGEMENT FOR AN EVAPORATION SYSTEM AND USE OF IT
Document Type and Number:
WIPO Patent Application WO/2024/041388
Kind Code:
A1
Abstract:
A top-down sublimation arrangement (1,100) for an evaporation system and use of it, at least comprising at least one heatable top-down sublimation crucible (10) having at least one sidewall (14), being fillable with evaporation material (11,11a,11b) and arranged above a substrate (12) to be coated, at least one heatable lid (13) comprising a plurality of apertures (131), characterized in that the at least one heatable lid (13) forms a bottom of the at least one sublimation crucible (10).
Inventors:
PENG SHOU (CN)
YIN XINJIAN (CN)
FU GANHUA (CN)
MA LIYUN (CN)
MISCHKE MARCEL (DE)
YIN XINJIAN (CN)
FU GANHUA (CN)
MA LIYUN (CN)
MISCHKE MARCEL (DE)
Application Number:
PCT/CN2023/112042
Publication Date:
February 29, 2024
Filing Date:
August 09, 2023
Export Citation:
Assignee:
CHINA TRIUMPH INT ENG CO LTD (CN)
CTF SOLAR GMBH (DE)
CTF SOLAR GMBH (DE)
International Classes:
C23C14/24
Domestic Patent References:
| WO2016122046A1 | 2016-08-04 | |||
| WO2016167479A1 | 2016-10-20 |
Foreign References:
| KR20140133133A | 2014-11-19 | |||
| KR20140145843A | 2014-12-24 | |||
| US20140147992A1 | 2014-05-29 | |||
| CN109355628A | 2019-02-19 |
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (GENERAL PARTNERSHIP) (CN)
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