TOROIDAL LOW-FIELD REACTIVE GAS AND PLASMA SOURCE HAVING A DIELECTRIC VACUUM VESSEL

Title:

TOROIDAL LOW-FIELD REACTIVE GAS AND PLASMA SOURCE HAVING A DIELECTRIC VACUUM VESSEL

Document Type and Number:

WIPO Patent Application WO2004095499

Kind Code:

A3

Abstract:

Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus (300) includes a vessel (310) and at least one ignition electrode (330) adjacent to the vessel. A total length of a dimension (D) of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.

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Inventors:

HOLBER WILLIAM M (US)
CHEN XING (US)
COWE ANDREW B (US)
BESEN MATTHEW M (US)
COLLINS JR RONALD W (US)
TRULLI SUSAN C (US)
SHAO SHOUQIAN (US)

Application Number:

PCT/US2004/011183

Publication Date:

February 10, 2005

Filing Date:

April 12, 2004

Export Citation:

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Assignee:

APPLIED SCIENCE & TECHNOLOGY I (US)
HOLBER WILLIAM M (US)
CHEN XING (US)
COWE ANDREW B (US)
BESEN MATTHEW M (US)
COLLINS JR RONALD W (US)
TRULLI SUSAN C (US)
SHAO SHOUQIAN (US)

International Classes:

H01J37/32; (IPC1-7): H01J37/32

Foreign References:

US1534251A	1925-04-21
US5834905A	1998-11-10
US3291715A	1966-12-13
US6167835B1	2001-01-02
US6150628A	2000-11-21
US6063233A	2000-05-16

Other References: