Title:
TORQUE DETECTOR, AND METHOD FOR PRODUCING TORQUE DETECTOR
Document Type and Number:
WIPO Patent Application WO/2019/035291
Kind Code:
A1
Abstract:
The present invention is provided with: a silicon layer (11); a resistance gauge (13) formed in the silicon layer (11); a groove (111) which is formed in one surface of the silicon layer (11), and which defines a place where the resistance gauge (13) in the silicon layer (11) is formed as a thin portion (112); and an insulation layer (12) which is joined to the one surface of the silicon layer (11).
Inventors:
SETO YUKI (JP)
ISHIKURA YOSHIYUKI (JP)
OGASAWARA RINA (JP)
ISHIKURA YOSHIYUKI (JP)
OGASAWARA RINA (JP)
Application Number:
PCT/JP2018/025896
Publication Date:
February 21, 2019
Filing Date:
July 09, 2018
Export Citation:
Assignee:
AZBIL CORP (JP)
International Classes:
G01L3/14; G01L3/10
Domestic Patent References:
| WO2003074986A1 | 2003-09-12 |
Foreign References:
| JPS61223625A | 1986-10-04 | |||
| JPH0846218A | 1996-02-16 | |||
| US20060137470A1 | 2006-06-29 |
Attorney, Agent or Firm:
TAZAWA, Hideaki et al. (JP)
Download PDF: