Title:
TRAINING DATA CREATION METHOD AND DEVICE, AND DEFECT INSPECTING METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/059011
Kind Code:
A1
Abstract:
Provided are a training data creation method and device, and a defect inspecting method and device with which defect inspection accuracy can be ensured even if the number of defect samples used to create the training data is small. This training data creation method includes the steps of: acquiring a training image including a received light image created on the basis of reflected light or transmitted light from an object under inspection, obtained by radiating a light beam or radiation at the object under inspection, which has a defect; subjecting the training image to a frequency distribution analysis; accepting input of a parameter for specifying a frequency band; selecting a frequency band signal from an analysis result of the frequency distribution analysis, in accordance with the frequency band specified by the parameter; acquiring defect information indicating the defect, for an image corresponding to the frequency band signal; and, on the basis of the defect information, creating training data for use in learning by a defect inspecting device for inspecting defects in the object under inspection.
Inventors:
KANEKO YASUHIKO (JP)
Application Number:
PCT/JP2018/033341
Publication Date:
March 28, 2019
Filing Date:
September 10, 2018
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G01N21/88; G01N23/04; G01N23/18; G06N99/00; G06T7/00; G06V10/764; H01L21/66
Foreign References:
| JP2017107313A | 2017-06-15 | |||
| JP2016115331A | 2016-06-23 | |||
| US20170236013A1 | 2017-08-17 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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