Title:
TRANSDUCER AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2022/259745
Kind Code:
A1
Abstract:
This transducer includes: a support which has a cavity; a vibration membrane which is provided facing the cavity and which is capable of vibration in the facing direction; and a piezoelectric element at least part of which is formed on the surface of the vibration membrane on the opposite side from the cavity. The vibration membrane has, on part of the outer peripheral edge of the vibration membrane, a connection part connected to the support. The vibration membrane is asymmetrically shaped with respect to a straight line orthogonal to the line extending along the surface of the vibration membrane and connecting both ends of the connection part.
Inventors:
SUZUKI TATSUYA (JP)
FUJIMORI YOSHIKAZU (JP)
FUJIMORI YOSHIKAZU (JP)
Application Number:
PCT/JP2022/016714
Publication Date:
December 15, 2022
Filing Date:
March 31, 2022
Export Citation:
Assignee:
ROHM CO LTD (JP)
International Classes:
B81B3/00; B81C1/00; H01L41/09; H01L41/113; H04R17/00; H04R17/02; H04R31/00
Domestic Patent References:
| WO2021106265A1 | 2021-06-03 |
Foreign References:
| JPS5797299A | 1982-06-16 | |||
| JP2017123391A | 2017-07-13 |
Attorney, Agent or Firm:
AI ASSOCIATION OF PATENT AND TRADEMARK ATTORNEYS (JP)
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