Title:
TRANSDUCER AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2022/264654
Kind Code:
A1
Abstract:
A transducer comprising: a support having a cavity; a vibration film provided opposite the cavity and capable of vibrating in the opposite direction; a piezoelectric element of which at least a part is formed on the vibration film; and an insulating film disposed on the vibration film. The vibration film includes a connection portion in a part of the outer periphery of the vibration film, the connection portion being connected to the support. A cantilever is formed which comprises the vibration film, a part of the piezoelectric element that is disposed on the vibration film, and the insulating film, the cantilever having a fixed end and a free end. The cantilever in the neutral position is held in a warped attitude with the free end of the cantilever drooping toward the cavity with respect to the fixed end.
More Like This:
Inventors:
SUZUKI TATSUYA (JP)
FUJIMORI YOSHIKAZU (JP)
FUJIMORI YOSHIKAZU (JP)
Application Number:
PCT/JP2022/016705
Publication Date:
December 22, 2022
Filing Date:
March 31, 2022
Export Citation:
Assignee:
ROHM CO LTD (JP)
International Classes:
H04R17/00; H01L41/09; H01L41/113; H01L41/311; H04R17/02; H04R31/00
Domestic Patent References:
| WO2021106265A1 | 2021-06-03 | |||
| WO2021049292A1 | 2021-03-18 |
Foreign References:
| US20120267899A1 | 2012-10-25 | |||
| JP2006237792A | 2006-09-07 |
Attorney, Agent or Firm:
AI ASSOCIATION OF PATENT AND TRADEMARK ATTORNEYS (JP)
Download PDF:
Previous Patent: SHEET FOR APPLICATION TO BODY
Next Patent: MAGNETOSTRICTIVE POWER GENERATION ELEMENT
Next Patent: MAGNETOSTRICTIVE POWER GENERATION ELEMENT