Title:
TRANSDUCER-TYPE VACUUM GAUGE
Document Type and Number:
WIPO Patent Application WO/2011/099238
Kind Code:
A1
Abstract:
Provided is a transducer-type vacuum gauge with low running cost, capable of measuring pressures at a plurality of positions in accordance with an object to be measured without impairing the features of saving space, reducing power or lowered cost. A body (11) attachable to a vacuum chamber (VC) is provided, and sensor parts (15, 16, 17), a first detection means (19), a first power source (E1) supplying power necessary for pressure measurement, and a control means (C) for controlling the operation of the first power source and measuring pressure by processing the output from the first detection means are integrally mounted on the body (11). A second detection means including a sensor part, which can share the changing range of pressure of the vacuum chamber with the first detection means and detect the pressure, can be connected to the body through wiring. A second power source (E2), which supplies the second detection means with the power necessary for measurement, is provided in the body (11), and measurement of the pressure can be implemented by incorporating in the control means the output from the second detection means.
Inventors:
NAKAJIMA, Toyoaki (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中島 豊昭 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
MIYASHITA, Takeshi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
宮下 剛 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
NAGATA, Yasushi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中島 豊昭 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
MIYASHITA, Takeshi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
宮下 剛 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
NAGATA, Yasushi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
Application Number:
JP2011/000290
Publication Date:
August 18, 2011
Filing Date:
January 20, 2011
Export Citation:
Assignee:
ULVAC, INC. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 〒2538543, JP)
NAKAJIMA, Toyoaki (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中島 豊昭 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
MIYASHITA, Takeshi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
宮下 剛 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 〒2538543, JP)
NAKAJIMA, Toyoaki (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中島 豊昭 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
MIYASHITA, Takeshi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
宮下 剛 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
International Classes:
G01L21/00; G01L21/12; G01L21/32
Attorney, Agent or Firm:
SEIGA PATENT AND TRADEMARK CORPORATION (9th Fl, Saisho Bldg. 1-14 Nishi-Gotanda 8-chome, Shinagawa-k, Tokyo 31, 〒1410031, JP)
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Claims: