TRANSDUCER-TYPE VACUUM GAUGE

WIPO Patent Application WO/2011/099238

A1

Provided is a transducer-type vacuum gauge with low running cost, capable of measuring pressures at a plurality of positions in accordance with an object to be measured without impairing the features of saving space, reducing power or lowered cost. A body (11) attachable to a vacuum chamber (VC) is provided, and sensor parts (15, 16, 17), a first detection means (19), a first power source (E1) supplying power necessary for pressure measurement, and a control means (C) for controlling the operation of the first power source and measuring pressure by processing the output from the first detection means are integrally mounted on the body (11). A second detection means including a sensor part, which can share the changing range of pressure of the vacuum chamber with the first detection means and detect the pressure, can be connected to the body through wiring. A second power source (E2), which supplies the second detection means with the power necessary for measurement, is provided in the body (11), and measurement of the pressure can be implemented by incorporating in the control means the output from the second detection means.

NAKAJIMA TOYOAKI (JP)
MIYASHITA TAKESHI (JP)
NAGATA YASUSHI (JP)
FUKUHARA MASAHIRO (JP)
UCHIDA YASUFUMI (JP)

PCT/JP2011/000290

August 18, 2011

January 20, 2011

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ULVAC INC (JP)
NAKAJIMA TOYOAKI (JP)
MIYASHITA TAKESHI (JP)
NAGATA YASUSHI (JP)
FUKUHARA MASAHIRO (JP)
UCHIDA YASUFUMI (JP)

G01L21/00; G01L21/12; G01L21/32

JP2001215163A	2001-08-10
JPH0493735A	1992-03-26
JPS62218834A	1987-09-26

SEIGA PATENT AND TRADEMARK CORPORATION (JP)
SEIGA Patent and Trademark Corporation (JP)

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