Title:
TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2021/124611
Kind Code:
A1
Abstract:
A transducer (100) is provided with a base part (110), a plurality of beam parts (120) and a coupling member part (130). Each of the beam parts (120) includes a piezoelectric layer (10), a first electrode layer (20) and a second electrode layer (30). The coupling member part (130) in slits (123) formed between adjacent beam parts (120) couples the adjacent beam parts (120) to each other. The coupling member part (130) is provided so as to continue from the top of the base part (110) across the insides of the slits (123). The coupling member part (130) is configured by a material having a lower Young's modulus than a material constituting the piezoelectric layer (10). In the central axial direction of the base part (110), the maximum thickness of the coupling member part (130) positioned on the top of the base part (110) is thicker than the thickness of each of the beam parts (120).
Inventors:
IKEUCHI SHINSUKE (JP)
UMEZAWA SEIJI (JP)
SUZUKI MASAYUKI (JP)
KUROKAWA FUMIYA (JP)
UMEZAWA SEIJI (JP)
SUZUKI MASAYUKI (JP)
KUROKAWA FUMIYA (JP)
Application Number:
PCT/JP2020/031101
Publication Date:
June 24, 2021
Filing Date:
August 18, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L41/187; H02N2/00; H01L41/337; H04R17/00
Foreign References:
| US10293377B2 | 2019-05-21 | |||
| US9497556B2 | 2016-11-15 | |||
| JPS59144997U | 1984-09-27 | |||
| JPS61150499A | 1986-07-09 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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